On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

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Authors

SOUČEK Pavel SCHMIDTOVÁ Tereza ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma VAŠINA Petr CAHA Ondřej BURŠÍK Jiří PEŘINA Vratislav

Year of publication 2011
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Thick hard adherent nc-TiC/a-C:H coatings were prepared by a hybrid PVD-PECVD process of Ti target sputtering in Ar/C2H2 atmosphere. The effect of carbon content on mechanical properties such as hardness, Young’s modulus and internal stress is studied in this contribution.
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