The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films

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Authors

ČERMÁK Martin KELAROVÁ Štěpánka JURMANOVÁ Jana KÜHROVÁ Pavlína BURŠÍKOVÁ Vilma

Year of publication 2022
Type Article in Periodical
Magazine / Source Diamond and Related Materials
MU Faculty or unit

Faculty of Science

Citation
Web https://www.sciencedirect.com/science/article/pii/S0925963522004277#!
Doi http://dx.doi.org/10.1016/j.diamond.2022.109245
Keywords Ellipsometry; Spectrophotometry; Diamond like carbon; Inhomogeneous thin film; Scanning electron microscope
Description Optical characterization from the FIR to the V-UV region of silicon and oxygen doped carbon films deposited on a silicon substrates is performed. In this work, the deposited films are considered as optically inhomogeneous, i.e., the optical constants depend on the depth in the films. According to the optical analysis, there is a transition layers under the deposited films with optical constants similar to amorphous silicon with hydrogen, carbon and oxygen additions. The film thicknesses obtained from optical characterization are compared with those obtained from scanning electron microscope images. From electron microscope images it is evident that the film properties are truly depth-dependent. The optical constants of the films and transition layers as functions of photon energy over the studied spectrum are determined. The static conductivity of the films is determined from measurements in FIR region. From spectral analysis in the mid-infrared region, resonance peaks were detected and the chemical composition of the film and transition layers is presented. The chemical composition is compared with the results of the EDX.
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