Boron-based thin layers deposited by RF plasma jet with slit nozzle

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Authors

PIJÁKOVÁ Barbora ALBERTI Milan ALBERTI Milan KLÍMA Miloš KLÍMA Miloš

Year of publication 2016
Type Article in Proceedings
Conference HAKONE XV: INTERNATIONAL SYMPOSIUM ON HIGH PRESSURE LOW TEMPERATURE PLASMA CHEMISTRY: WITH JOINT COST TD1208 WORKSHOP: NON-EQUILIBRIUM PLASMAS WITH LIQUIDS FOR WATER AND SURFACE TREATMENT
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords friction coefficient; RF plasma jet; trimethyl borate
Description Preparation of thin layers with low friction coefficient using RF atmospheric pressure plasma slit jet system with addition of organic precursor aerosol.
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